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Resist Series/ Property |
DF-1000 Series Film |
DF-2000 Series Film |
DF-3000 Series Film |
DF-3500 Series Film |
DF-4000 Series Film | |||
Material Overview |
For higher aspect ratio films. |
Better batch to batch photospeed |
Lower stress film |
Non-Sb version of DF-2000 series
|
Hydrophobic surface, high contact angle film |
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Glass Transition Temperature, DMA TanD, °C |
180 |
180 |
120 |
180 |
180 |
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H2O Contact Angle, 23°C |
73° |
72° |
74° |
74° |
95° |
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Observed Color, After PEB |
Clear |
Green |
Tan |
Green |
Green |
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Minimum Resolution, 20µ film |
3µ |
3µ |
4-5µ |
4µ |
3µ |
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Maximum Aspect Ratio, 20µ film |
8:1 |
8:1 |
5:1 |
8:1 |
8:1 |
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Thickness’ Available |
5-100µ |
5-50µ
|
5-75µ
|
5-75µ |
14 and 17µ
|
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UV Cure E, Contact Imaging, mJ/cm2, 20µ film |
175 |
90
|
120
|
150
|
90
|
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UV Chemistry |
Sb |
Sb |
Non-Sb
|
Non-Sb |
Sb, hydrophobic dual layer coating |
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25°C, 8 week soak, % Uptake: H2O, Xylene, IPA, MEK, DMSO |
<0.25% |
<0.25% |
<0.25%
|
<0.25%
|
<0.25% |
*Typical Film Stack
* Ability to tent across 750µ channels